请将下列内容翻译: The 1950s saw the development of many different types of transistor technology, which led to the development of the silicon age. The 1960s were an era of process development to begin the integration of ICs, with many new chip-manufacturing companies. The 1970s were the era of medium-scale integration and saw increased competition in the industry, the development of the microprocessor and the development of equipment technology. The 1980s introduced automation into the wafer fab and improvements in manufacturing efficiency and product quality. The 1990s were the ULSI integration era with the volume production of a wide range of IC's with sub-micron geometries.